INHOMOGENEOUS CONCENTRATION DISTRIBUTION IN OBLIQUELY EVAPORATED FE-CU FILMS

被引:11
作者
KEITOKU, S [1 ]
KAMIMORI, T [1 ]
GOTO, M [1 ]
机构
[1] EHIME UNIV,FAC SCI,DEPT PHYS,MATSUYAMA,EHIME 790,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 11期
关键词
D O I
10.1143/JJAP.25.1668
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1668 / 1671
页数:4
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