TARGET EFFECTS DURING THE DEPOSITION OF TI-A-C-H FILMS

被引：15

作者：

HARNACK, JT

THIEME, F

BENNDORF, C

机构：

来源：

SURFACE & COATINGS TECHNOLOGY | 1989年 / 39卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(89)90062-5

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：285 / 292

页数：8

共 6 条

[1]

CATHERINE Y, 1987, E MRS M P STRASBOURG, V17, P145

[2] TRIBOLOGICAL AND ELECTRICAL-PROPERTIES OF METAL-CONTAINING HYDROGENATED CARBON-FILMS [J].

DIMIGEN, H ;

HUBSCH, H ;

MEMMING, R .

APPLIED PHYSICS LETTERS, 1987, 50 (16) :1056-1058

[3]

Dimigen H., 1983, Philips Technical Review, V41, P186

[4] FRICTIONAL-PROPERTIES OF DIAMOND-LIKE CARBON LAYERS [J].

ENKE, K ;

DIMIGEN, H ;

HUBSCH, H .

APPLIED PHYSICS LETTERS, 1980, 36 (04) :291-292

[5] QUANTITATIVE XPS-ANALYSIS OF TANTALUM-CONTAINING AMORPHOUS-CARBON FILMS [J].

GRISCHKE, M ;

BRAUER, A ;

BENNDORF, C ;

THIEME, F ;

WILLICH, P .

FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE, 1989, 333 (4-5) :299-303

[6] EMPIRICAL ATOMIC SENSITIVITY FACTORS FOR QUANTITATIVE-ANALYSIS BY ELECTRON-SPECTROSCOPY FOR CHEMICAL-ANALYSIS [J].

WAGNER, CD ;

DAVIS, LE ;

ZELLER, MV ;

TAYLOR, JA ;

RAYMOND, RH ;

GALE, LH .

SURFACE AND INTERFACE ANALYSIS, 1981, 3 (05) :211-225

← 1 →