QUANTITATIVE XPS-ANALYSIS OF TANTALUM-CONTAINING AMORPHOUS-CARBON FILMS

被引：6

作者：

GRISCHKE, M

BRAUER, A

BENNDORF, C

THIEME, F

WILLICH, P

机构：

[1] UNIV HAMBURG,DEPT PHYS CHEM,DIV SURFACE CHEM,BUNDESSTR 45,D-2000 HAMBURG 13,FED REP GER

[2] PHILIPS GMBH,FORSCHUNGSLAB HAMBURG,D-2000 HAMBURG 54,FED REP GER

来源：

FRESENIUS ZEITSCHRIFT FUR ANALYTISCHE CHEMIE | 1989年 / 333卷 / 4-5期

关键词：

D O I：

10.1007/BF00572308

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：299 / 303

页数：5

共 14 条

[1]

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[2]

BRAUER A, 1988, THESIS U HAMBURG

[3] TRIBOLOGICAL AND ELECTRICAL-PROPERTIES OF METAL-CONTAINING HYDROGENATED CARBON-FILMS [J].

DIMIGEN, H ;

HUBSCH, H ;

MEMMING, R .

APPLIED PHYSICS LETTERS, 1987, 50 (16) :1056-1058

[4]

Dimigen H., 1983, Philips Technical Review, V41, P186

[5] FRICTIONAL-PROPERTIES OF DIAMOND-LIKE CARBON LAYERS [J].

ENKE, K ;

DIMIGEN, H ;

HUBSCH, H .

APPLIED PHYSICS LETTERS, 1980, 36 (04) :291-292

[6]

GRISCHKE M, 1987, E MRS C STRASBOURG, P491

[7]

KOBERLE H, 1987, EDITIONS PHYSIQUE, V17, P481

[8]

ROBERTSON J, 1986, ADV PHYS, V35, P317, DOI 10.1080/00018738600101911

[9] QUANTITATIVE XPS - THE CALIBRATION OF SPECTROMETER INTENSITY ENERGY RESPONSE FUNCTIONS .1. THE ESTABLISHMENT OF REFERENCE PROCEDURES AND INSTRUMENT BEHAVIOR [J].

SEAH, MP ;

ANTHONY, MT .

SURFACE AND INTERFACE ANALYSIS, 1984, 6 (05) :230-241

[10]

VARGA P, 1981, J NUCL MATER, V111, P726

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