SPATIALLY-RESOLVED MEASUREMENT OF LATTICE DAMAGE IN ALPHA-PARTICLE-IRRADIATED TYPE-IIA NATURAL DIAMOND BY CONFOCAL PHOTOLUMINESCENCE MICROSCOPY

被引：5

作者：

AGER, JW

HAN, S

PRUSSIN, SG

WAGNER, RS

PAN, LS

KANIA, DR

LANE, SM

机构：

[1] UNIV CALIF BERKELEY,DEPT NUCL ENGN,BERKELEY,CA 94720

[2] LOS ALAMOS NATL LAB,DIV ELECTR,LOS ALAMOS,NM 87545

[3] LAWRENCE LIVERMORE NATL LAB,LASER PROGRAM,LIVERMORE,CA 94550

来源：

JOURNAL OF APPLIED PHYSICS | 1994年 / 76卷 / 07期

关键词：

D O I：

10.1063/1.357353

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Confocal fluorescence microscopy has been used to measure the three-dimensional distribution of the H3 color center produced in type IIa natural diamonds by 5 MeV He+ irradiation at a total fluence of 8 x 10(15) cm-2. The peak of the H3 emission occurs 16 mum below the surface of the irradiated side of the diamond, which is in fair agreement with the peak of the vacancy distribution predicted by a Monte Carlo calculation (transport of ions in matter or TRIM). The H3 distribution is broader in the direction normal to the surface (10 mum full width at half maximum) than the TRIM calculation. This is attributed to diffusion of vacancies caused by self-annealing during irradiation.

引用

页码：4050 / 4053

页数：4

共 14 条

[1] Light-ion-beam-induced annealing of implantation damage in diamond [J].