SILICON OXYNITRIDE FILMS ON FUSED SILICA FOR OPTICAL WAVEGUIDES

被引：43

作者：

RAND, MJ

STANDLEY, RD

机构：

来源：

APPLIED OPTICS | 1972年 / 11卷 / 11期

关键词：

D O I：

10.1364/AO.11.002482

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：2482 / +

页数：1

相关论文

共 26 条

[21] LEVELING OF VITREOUS SURFACES
RHODES, JF
KING, BW
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1970, 53 (03) : 134 - &
[22] RADIATION-INSENSITIVE SILICON OXYNITRIDE FILMS FOR USE IN SILICON DEVICES
SCHMIDT, PF
RAND, MJ
MITCHELL, JP
ASHNER, JD
[J]. IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1969, NS16 (06) : 211 - +
[23] PROPERTIES OF ION-BOMBARDED FUSED QUARTZ FOR INTEGRATED OPTICS
STANDLEY, RD
RODGERS, JW
GIBSON, WM
[J]. APPLIED OPTICS, 1972, 11 (06): : 1313 - &
[24] THIN ORGANOSILICON FILMS FOR INTEGRATED OPTICS
TIEN, PK
SMOLINSKY, G
MARTIN, RJ
[J]. APPLIED OPTICS, 1972, 11 (03) : 637 - +
[25] MODES OF PROPAGATING LIGHT WAVES IN THIN DEPOSITED SEMICONDUCTOR FILMS
TIEN, PK
ULRICH, R
MARTIN, RJ
[J]. APPLIED PHYSICS LETTERS, 1969, 14 (09) : 291 - &
[26] SOLUTION-DEPOSITED THIN-FILMS AS PASSIVE AND ACTIVE LIGHT-GUIDES
ULRICH, R
WEBER, HP
[J]. APPLIED OPTICS, 1972, 11 (02): : 428 - &