VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY STUDIES OF ORIENTED PHTHALOCYANINE FILMS .2. COPPER PHTHALOCYANINE

被引:45
作者
DEBE, MK
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1992年 / 10卷 / 04期
关键词
D O I
10.1116/1.577916
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Recent studies obtaining the anisotropic complex dielectric spectra of oriented metal-free phthalocyanine (H2PC) films with variable angle spectroscopic ellipsometry (VASE) have been extended to similarly oriented copper phthalocyanine (CuPc) thin films. The CuPc films were vacuum vapor deposited onto sputter deposited copper substrates. Two classes of anisotropically oriented films with thicknesses on the order of 1000 angstrom were produced with the molecular stacking b-axis in either a "standing" or surface-parallel configuration by controlling the substrate temperature. Reflection absorption infrared spectroscopy and x-ray diffraction were used to verify the different orientations. VASE data were acquired over a 4000-8000 angstrom wavelength range in 100 angstrom steps, and 45-degrees-79-degrees incidence angle range in 2-degrees steps. Three-dimensional plots of the ellipsometric parameters, DELTA and PSI, versus wavelength and incidence angle have different characteristic shapes for the two classes of oriented films, similar to H2PC, leading to significant differences in the optical constant spectral solutions obtained with an isotropic film model. Knowing the high degree of uniaxial ordering in the two film classes, approximate solutions to the parallel and perpendicular optical constants taken with respect to the crystalline b axis can be extracted from the isotropic solutions using a two-dimensional Bruggeman effective medium approximation.
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页码:2816 / 2821
页数:6
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