THE EFFECTS OF SUBSTRATE AND BIAS ON CONICR/CR THIN-FILMS

被引：12

作者：

DENG, YP ^{[1
]}

LAMBETH, DN ^{[1
]}

LAUGHLIN, DE ^{[1
]}

机构：

[1] CARNEGIE MELLON UNIV,DEPT MAT SCI & ENGN,PITTSBURGH,PA 15213

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1992年 / 28卷 / 05期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/20.179724

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The magnetic properties and microstructural characteristics of CoNiCr/Cr films with thin Cr underlayers prepared on both single crystal Si and glass substrates are discussed. It is found that {200} crystallographic texture is easily obtained for Cr films prepared on Si at room temperature. Substrate bias during the Cr deposition, however, changes the Cr {200} texture to {110}. Substrate bias during the CoNiCr deposition degrades the texture of the Cr underlayer.

引用

页码：3096 / 3098

页数：3

共 6 条

[1] ELECTRON MICROSCOPY ON HIGH-COERCIVE-FORCE CO-CR COMPOSITE FILMS [J].

DAVAL, J ;

RANDET, D .

IEEE TRANSACTIONS ON MAGNETICS, 1970, MAG6 (04) :768-&

[2] THE DEPENDENCE OF THE MICROSTRUCTURE AND MAGNETIC-PROPERTIES OF CONICR/CR THIN-FILMS ON THE SUBSTRATE-TEMPERATURE [J].

DUAN, SL ;

ARTMAN, JO ;

WONG, B ;

LAUGHLIN, DE .

IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) :1587-1589

[3] THE CRYSTALLOGRAPHY AND TEXTURE OF CO-BASED THIN-FILM DEPOSITED ON CR UNDERLAYERS [J].

LAUGHLIN, DE ;

WONG, BY .

IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) :4713-4717

[4] EFFECTS OF RF BIAS ON THE TEXTURE, MAGNETICS, AND RECORDING PROPERTIES OF RF-SPUTTERED COCR/CR LONGITUDINAL THIN-FILM MEDIA [J].

LU, M ;

JUDY, JH ;

SIVERTSEN, JM .

IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) :1581-1583

[5] CRYSTALLOGRAPHY AND MAGNETIC-PROPERTIES OF COCRTA FILMS PREPARED ON CR UNDERLAYERS WITH DIFFERENT SUBSTRATE BIAS CONDITIONS [J].

PRESSESKY, J ;

LEE, SY ;

DUAN, S ;

WILLIAMS, D .

JOURNAL OF APPLIED PHYSICS, 1991, 69 (08) :5163-5165

[6]

TONI T, 1990, IEEE T MAGN, V26, P1282

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