ABSOLUTE CROSS-SECTIONS FOR FLUORINE 3P-]3S LINE EMISSIONS FOLLOWING SINGLE ELECTRON-IMPACT ON NF3, CF4, AND SF6

被引：39

作者：

BLANKS, KA

TABOR, AE

BECKER, K

机构：

来源：

JOURNAL OF CHEMICAL PHYSICS | 1987年 / 86卷 / 09期

关键词：

D O I：

10.1063/1.452657

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：4871 / 4875

页数：5

共 26 条

[1] ION AND ELECTRON-IMPACT IONIZATION OF CF4 STUDIED VIA UV EMISSION [J].

AARTS, JFM .

CHEMICAL PHYSICS LETTERS, 1985, 114 (01) :114-120

[2] METASTABLE FRAGMENT PRODUCTION FOLLOWING ELECTRON-IMPACT ON CO2 [J].

ALLCOCK, G ;

MCCONKEY, JW .

JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1976, 9 (12) :2127-2139

[3] DISSOCIATION PATTERNS IN N2O FOLLOWING ELECTRON-IMPACT [J].

ALLCOCK, G ;

MCCONKEY, JW .

CHEMICAL PHYSICS, 1978, 34 (02) :169-179

[4]

Bashkin S., 1975, ATOMIC ENERGY LEVELS

[5] DISSOCIATIVE EXCITATION OF SO2 BY CONTROLLED ELECTRON-IMPACT [J].

BECKER, K ;

VANWIJNGAARDEN, W ;

MCCONKEY, JW .

PLANETARY AND SPACE SCIENCE, 1983, 31 (02) :197-206

[6] POLARIZATION OF THE OH(ALPHA-2-SIGMA+,UPSILON'=0-]CHI2-PI-I,UPSILON''=0) FLUORESCENCE PRODUCED ELECTRON-IMPACT ON WATER-VAPOR [J].

BECKER, K ;

STUMPF, B ;

SCHULZ, G .

CHEMICAL PHYSICS, 1980, 53 (1-2) :31-38

[7] ELIMINATION OF POLARIZATION CORRECTIONS FROM OPTICAL EXCITATION-FUNCTION MEASUREMENTS [J].

CLOUT, PN ;

HEDDLE, DWO .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1969, 59 (06) :715-&

[8]

CORR JJ, IN PRESS J PHYS B, V20

[9]

Danilevskii N. P., 1986, Optics and Spectroscopy, V60, P441

[10] ANISOTROPIC ETCHING OF SIO2 IN LOW-FREQUENCY CF4/O2 AND NF3/AR PLASMAS [J].

DONNELLY, VM ;

FLAMM, DL ;

DAUTREMONTSMITH, WC ;

WERDER, DJ .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (01) :242-252

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