ARF LASER CVD OF HYDROGENATED AMORPHOUS-SILICON - THE ROLE OF BUFFER GASES

[1] GEOMETRICAL STRUCTURES, FORCE-CONSTANTS, AND VIBRATIONAL-SPECTRA OF SIH, SIH2, SIH3, AND SIH4 [J]. CHEMICAL PHYSICS, 1986, 108 (02) : 243 - 274

[2] BAUERLE D, 1986, SPRINGER SER MAT SCI, V1

[3] CO2 LASER-ASSISTED DEPOSITION OF BORON AND PHOSPHORUS-DOPED HYDROGENATED AMORPHOUS-SILICON [J]. APPLIED PHYSICS LETTERS, 1985, 47 (03) : 279 - 281

[4] PHOTOELECTRON-SPECTRA AND MOLECULAR-PROPERTIES .51. IONIZATION-POTENTIALS OF SILANES SINH2N+2 [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1976, 98 (03) : 668 - 674

[5] PHOTOVOLTAIC POWER [J]. PHYSICS IN TECHNOLOGY, 1986, 17 (04): : 152 - 161

[6] ABSOLUTE RATE CONSTANTS FOR SILYLENE REACTIONS WITH HYDROCARBONS AT 298-K [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1987, 91 (20) : 5340 - 5343

[7] COMES FJ, 1987, STATUSREPORT 1987 PH, P143

[8] HIGH-EFFICIENCY AMORPHOUS ALLOY SOLAR-CELLS PREPARED BY MERCURY-SENSITIZED PHOTOCHEMICAL VAPOR-DEPOSITION OF DISILANE [J]. SOLAR CELLS, 1987, 21 : 153 - 166

[9] DELAHOY AE, 1985, MATERIALS RES SOC S, V49, P33

[10] ELECTRON-ENERGY LOSS SPECTROSCOPY OF DISILANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1988, 88 (07) : 4320 - 4323

[1] GEOMETRICAL STRUCTURES, FORCE-CONSTANTS, AND VIBRATIONAL-SPECTRA OF SIH, SIH2, SIH3, AND SIH4 [J]. CHEMICAL PHYSICS, 1986, 108 (02) : 243 - 274

[2] BAUERLE D, 1986, SPRINGER SER MAT SCI, V1

[3] CO2 LASER-ASSISTED DEPOSITION OF BORON AND PHOSPHORUS-DOPED HYDROGENATED AMORPHOUS-SILICON [J]. APPLIED PHYSICS LETTERS, 1985, 47 (03) : 279 - 281

[4] PHOTOELECTRON-SPECTRA AND MOLECULAR-PROPERTIES .51. IONIZATION-POTENTIALS OF SILANES SINH2N+2 [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1976, 98 (03) : 668 - 674

[5] PHOTOVOLTAIC POWER [J]. PHYSICS IN TECHNOLOGY, 1986, 17 (04): : 152 - 161

[6] ABSOLUTE RATE CONSTANTS FOR SILYLENE REACTIONS WITH HYDROCARBONS AT 298-K [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1987, 91 (20) : 5340 - 5343

[7] COMES FJ, 1987, STATUSREPORT 1987 PH, P143

[8] HIGH-EFFICIENCY AMORPHOUS ALLOY SOLAR-CELLS PREPARED BY MERCURY-SENSITIZED PHOTOCHEMICAL VAPOR-DEPOSITION OF DISILANE [J]. SOLAR CELLS, 1987, 21 : 153 - 166

[9] DELAHOY AE, 1985, MATERIALS RES SOC S, V49, P33

[10] ELECTRON-ENERGY LOSS SPECTROSCOPY OF DISILANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1988, 88 (07) : 4320 - 4323