CO2 LASER-ASSISTED DEPOSITION OF BORON AND PHOSPHORUS-DOPED HYDROGENATED AMORPHOUS-SILICON

被引：18

作者：

BILENCHI, R ^{[1
]}

GIANINONI, I ^{[1
]}

MUSCI, M ^{[1
]}

MURRI, R ^{[1
]}

TACCHETTI, S ^{[1
]}

机构：

[1] UNIV BARI,IST FIS,I-70100 BARI,ITALY

来源：

关键词：

D O I：

10.1063/1.96191

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：279 / 281

页数：3

共 14 条

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[2] IMPURITY DOPING IN CHEMICALLY VAPOR-DEPOSITED AMORPHOUS HYDROGENATED SILICON FROM DISILANE
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OSAKA, Y
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (06) : 1425 - 1428
[3] HYDROGENATED AMORPHOUS-SILICON GROWTH BY CO2-LASER PHOTO-DISSOCIATION OF SILANE
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[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) : 6479 - 6481
[4] BILENCHI R, 1984, P SOC PHOTO-OPT INST, V459, P61, DOI 10.1117/12.939436
[5] BILENCHI R, 1983, LASER DIAGNOSTICS PH, V17, P199
[6] MONOSILYLPHOSPHINE FORMATION BY RAPID SILYLENE INSERTION IN THE IR PHOTOCHEMISTRY OF SIH4-PH3 MIXTURES
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LAMPE, FW
[J]. JOURNAL OF PHOTOCHEMISTRY, 1982, 20 (01): : 9 - 16
[7] LOW-TEMPERATURE CRYSTALLIZATION OF DOPED A-SI-H ALLOYS
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KURATA, H
HIROSE, M
OSAKA, Y
[J]. APPLIED PHYSICS LETTERS, 1980, 37 (12) : 1084 - 1086
[8] LASER-INDUCED DEPOSITION OF SILICON FILMS
HANABUSA, M
MORIYAMA, S
KIKUCHI, H
[J]. THIN SOLID FILMS, 1983, 107 (03) : 227 - 234
[9] KAZAHAYA T, 1984, 1ST INT PHOT SCI ENG, P449
[10] KNIGHTS JC, 1984, PHYSICS HYDROGENATED, V1, P36