LASER-INDUCED DEPOSITION OF SILICON FILMS

[1] LOW-TEMPERATURE GROWTH OF POLYCRYSTALLINE SI AND GE FILMS BY ULTRAVIOLET-LASER PHOTO-DISSOCIATION OF SILANE AND GERMANE [J]. APPLIED PHYSICS LETTERS, 1982, 40 (02) : 183 - 185

[2] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF POLYCRYSTALLINE SI FROM SICL4 [J]. APPLIED PHYSICS LETTERS, 1980, 36 (11) : 930 - 932

[3] BAUERLE D, 1982, APPL PHYS LETT, V40, P819, DOI 10.1063/1.93272

[4] HYDROGENATED AMORPHOUS-SILICON GROWTH BY CO2-LASER PHOTO-DISSOCIATION OF SILANE [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) : 6479 - 6481

[5] BILENCHI R, 1981, 8TH P INT C CHEM VAP, P275

[6] CHEMICAL VAPOR-DEPOSITION OF SILICON USING A CO2-LASER [J]. APPLIED PHYSICS LETTERS, 1978, 32 (04) : 254 - 256

[7] LASER PHOTODEPOSITION OF METAL-FILMS WITH MICROSCOPIC FEATURES [J]. APPLIED PHYSICS LETTERS, 1979, 35 (02) : 175 - 177

[8] INFRARED-LASER PHOTOCHEMISTRY OF SILANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1979, 70 (03) : 1187 - 1192

[9] EHRLICH DJ, 1981, APPL PHYS LETT, V39, P957, DOI 10.1063/1.92624

[10] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) : 1233 - 1243

[1] LOW-TEMPERATURE GROWTH OF POLYCRYSTALLINE SI AND GE FILMS BY ULTRAVIOLET-LASER PHOTO-DISSOCIATION OF SILANE AND GERMANE [J]. APPLIED PHYSICS LETTERS, 1982, 40 (02) : 183 - 185

[2] LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF POLYCRYSTALLINE SI FROM SICL4 [J]. APPLIED PHYSICS LETTERS, 1980, 36 (11) : 930 - 932

[3] BAUERLE D, 1982, APPL PHYS LETT, V40, P819, DOI 10.1063/1.93272

[4] HYDROGENATED AMORPHOUS-SILICON GROWTH BY CO2-LASER PHOTO-DISSOCIATION OF SILANE [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) : 6479 - 6481

[5] BILENCHI R, 1981, 8TH P INT C CHEM VAP, P275

[6] CHEMICAL VAPOR-DEPOSITION OF SILICON USING A CO2-LASER [J]. APPLIED PHYSICS LETTERS, 1978, 32 (04) : 254 - 256

[7] LASER PHOTODEPOSITION OF METAL-FILMS WITH MICROSCOPIC FEATURES [J]. APPLIED PHYSICS LETTERS, 1979, 35 (02) : 175 - 177

[8] INFRARED-LASER PHOTOCHEMISTRY OF SILANE [J]. JOURNAL OF CHEMICAL PHYSICS, 1979, 70 (03) : 1187 - 1192

[9] EHRLICH DJ, 1981, APPL PHYS LETT, V39, P957, DOI 10.1063/1.92624

[10] LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1980, 16 (11) : 1233 - 1243