HYDROGENATED AMORPHOUS-SILICON GROWTH BY CO2-LASER PHOTO-DISSOCIATION OF SILANE

被引：52

作者：

BILENCHI, R

GIANINONI, I

MUSCI, M

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 09期

关键词：

D O I：

10.1063/1.331494

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：6479 / 6481

页数：3

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