LASER MICROPHOTOCHEMISTRY FOR USE IN SOLID-STATE ELECTRONICS

被引：160

作者：

EHRLICH, DJ

OSGOOD, RM

DEUTSCH, TF

机构：

来源：

IEEE JOURNAL OF QUANTUM ELECTRONICS | 1980年 / 16卷 / 11期

关键词：

D O I：

10.1109/JQE.1980.1070386

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1233 / 1243

页数：11

共 26 条

[1]

Baklanov M. R., 1974, Soviet Physics - Doklady, V19, P312

[2] THERMAL DECOMPOSITION OF BORON TRIMETHYL [J].

BUCHANAN, AS ;

CREUTZBERG, F .

AUSTRALIAN JOURNAL OF CHEMISTRY, 1962, 15 (04) :744-&

[3]

Calvert J. G., 1966, PHOTOCHEMISTRY

[4]

CONNOR J, 1977, J AM CHEM SOC, V93, P5213

[5] OUTPUT MODE SPECTRA, COMPARATIVE PARAMETRIC OPERATION, QUENCHING, PHOTOLYTIC REVERSIBILITY, AND SHORT-PULSE GENERATION IN ATOMIC IODINE PHOTODISSOCIATION LASERS [J].

DAVIS, CC ;

PIRKLE, RJ ;

MCFARLANE, RA ;

WOLGA, GJ .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1976, 12 (06) :334-352

[6] OHMIC CONTACT FORMATION ON INP BY PULSED LASER PHOTOCHEMICAL DOPING [J].

DEUTSCH, TF ;

EHRLICH, DJ ;

OSGOOD, RM ;

LIAU, ZL .

APPLIED PHYSICS LETTERS, 1980, 36 (10) :847-849

[7] LASER PHOTODEPOSITION OF METAL-FILMS WITH MICROSCOPIC FEATURES [J].

DEUTSCH, TF ;

EHRLICH, DJ ;

OSGOOD, RM .

APPLIED PHYSICS LETTERS, 1979, 35 (02) :175-177

[8] PHOTODISSOCIATION OF ALKYL IODIDES [J].

DONOHUE, T ;

WIESENFELD, JR .

JOURNAL OF CHEMICAL PHYSICS, 1975, 63 (07) :3130-3135

[9]

EHRLICH DJ, 1980, APPL PHYS LETT, V36, P916, DOI 10.1063/1.91366

[10] LASER-INDUCED MICROSCOPIC ETCHING OF GAAS AND INP [J].

EHRLICH, DJ ;

OSGOOD, RM ;

DEUTSCH, TF .

APPLIED PHYSICS LETTERS, 1980, 36 (08) :698-700

← 1 2 3 →