ELECTRON-DIFFRACTION OF AMORPHOUS THIN-FILMS USING PEELS

被引:34
作者
COCKAYNE, D [1 ]
MCKENZIE, D [1 ]
MULLER, D [1 ]
机构
[1] UNIV SYDNEY,SCH PHYS,SYDNEY,NSW 2006,AUSTRALIA
来源
MICROSCOPY MICROANALYSIS MICROSTRUCTURES | 1991年 / 2卷 / 2-3期
关键词
D O I
10.1051/mmm:0199100202-3035900
中图分类号
TH742 [显微镜];
学科分类号
摘要
In previous work, a method for obtaining accurate reduced density functions, G(r), from chosen small regions of amorphous and polycrystalline thin films was described. The method involves scanning an electron diffraction pattern across the entrance aperture of a serial energy loss spectrometer. The method has been further developed, using a parallel energy loss spectrometer, and using filtering techniques to obtain more accurate data at both large and small scattering angles.
引用
收藏
页码:359 / 366
页数:8
相关论文
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