ELECTRON-DIFFRACTION OF AMORPHOUS THIN-FILMS USING PEELS

In previous work, a method for obtaining accurate reduced density functions, G(r), from chosen small regions of amorphous and polycrystalline thin films was described. The method involves scanning an electron diffraction pattern across the entrance aperture of a serial energy loss spectrometer. The method has been further developed, using a parallel energy loss spectrometer, and using filtering techniques to obtain more accurate data at both large and small scattering angles.