ION-ASSISTED DEPOSITION OF MIXED TIO2-SIO2 FILMS

被引：115

作者：

NETTERFIELD, RP ^{[1
]}

MARTIN, PJ ^{[1
]}

PACEY, CG ^{[1
]}

SAINTY, WG ^{[1
]}

MCKENZIE, DR ^{[1
]}

AUCHTERLONIE, G ^{[1
]}

机构：

[1] UNIV SYDNEY,SYDNEY,NSW 2006,AUSTRALIA

来源：

关键词：

D O I：

10.1063/1.344352

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1805 / 1809

页数：5

共 13 条

[1] ELECTRON-DIFFRACTION ANALYSIS OF POLYCRYSTALLINE AND AMORPHOUS THIN-FILMS
COCKAYNE, DJH
MCKENZIE, DR
[J]. ACTA CRYSTALLOGRAPHICA SECTION A, 1988, 44 : 870 - 878
[2] OPTICAL THIN-FILM SYNTHESIS PROGRAM BASED ON USE OF FOURIER-TRANSFORMS
DOBROWOLSKI, JA
LOWE, D
[J]. APPLIED OPTICS, 1978, 17 (19): : 3039 - 3050
[3] ELLIOTT SR, 1984, PHYSICS AMORPHOUS MA, P100
[4] Jacobsson R., 1975, PHYS THIN FILMS, V8, P51
[5] LAZOWASEM JE, 1988, OPTICAL INTERFERENCE
[6] ION-BEAM-ASSISTED DEPOSITION OF THIN-FILMS
MARTIN, PJ
MACLEOD, HA
NETTERFIELD, RP
PACEY, CG
SAINTY, WG
[J]. APPLIED OPTICS, 1983, 22 (01): : 178 - 184
[7] MCCRACKEN FL, 1979, NBS479 US TECH NOT
[8] MEGAW HD, 1973, CRYSTAL STRUCTURES W, P257
[9] CHARACTERIZATION OF GROWING THIN-FILMS BY INSITU ELLIPSOMETRY, SPECTRAL REFLECTANCE AND TRANSMITTANCE MEASUREMENTS, AND ION-SCATTERING SPECTROSCOPY
NETTERFIELD, RP
MARTIN, PJ
SAINTY, WG
DUFFY, RM
PACEY, CG
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (11) : 1995 - 2003
[10] PEARSON WD, 1972, CRYSTAL CHEM PHYSICS, P593