ION-ASSISTED DEPOSITION OF MIXED TIO2-SIO2 FILMS

被引:115
作者
NETTERFIELD, RP [1 ]
MARTIN, PJ [1 ]
PACEY, CG [1 ]
SAINTY, WG [1 ]
MCKENZIE, DR [1 ]
AUCHTERLONIE, G [1 ]
机构
[1] UNIV SYDNEY,SYDNEY,NSW 2006,AUSTRALIA
关键词
D O I
10.1063/1.344352
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1805 / 1809
页数:5
相关论文
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