CHARACTERIZATION OF GROWING THIN-FILMS BY INSITU ELLIPSOMETRY, SPECTRAL REFLECTANCE AND TRANSMITTANCE MEASUREMENTS, AND ION-SCATTERING SPECTROSCOPY

被引：40

作者：

NETTERFIELD, RP

MARTIN, PJ

SAINTY, WG

DUFFY, RM

PACEY, CG

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1985年 / 56卷 / 11期

关键词：

D O I：

10.1063/1.1138408

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：1995 / 2003

页数：9

相关论文

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