ION-BEAM-ASSISTED DEPOSITION OF THIN-FILMS

被引：235

作者：

MARTIN, PJ

MACLEOD, HA

NETTERFIELD, RP

PACEY, CG

SAINTY, WG

机构：

来源：

APPLIED OPTICS | 1983年 / 22卷 / 01期

关键词：

D O I：

10.1364/AO.22.000178

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：178 / 184

页数：7

共 26 条

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[7]

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[8]

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[10] EFFECT OF ION-BOMBARDMENT ON INITIAL-STAGES OF THIN-FILM GROWTH [J].

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