PLASMA X-RAY SOURCE FOR LITHOGRAPHY GENERATED BY A-ALMOST-EQUAL-TO-30 J, 30 NS KRF LASER

[1] PHASE CONJUGATION OF KRF LASER-RADIATION [J]. OPTICS LETTERS, 1981, 6 (11) : 557 - 559

[2] Chaker M., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V733, P58

[3] X-RAY-EMISSION FROM LASER-IRRADIATED PLANE SOLID TARGETS [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (06) : 2402 - 2414

[4] SUBNANOSECOND PULSES FROM A KRF LASER PUMPED SF6 BRILLOUIN AMPLIFIER [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1985, 21 (10) : 1558 - 1562

[5] GLIBERT KM, 1980, J APPL PHYS, V51, P1449

[6] X-RAY-LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 107 - 121

[7] EFFICIENT NARROWBAND ELECTRON-BEAM PUMPED KRF LASER FOR PULSE-COMPRESSION STUDIES [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (01) : 91 - 96

[8] Turcu E., 1987, Microelectronic Engineering, V6, P287, DOI 10.1016/0167-9317(87)90051-7

[1] PHASE CONJUGATION OF KRF LASER-RADIATION [J]. OPTICS LETTERS, 1981, 6 (11) : 557 - 559

[2] Chaker M., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V733, P58

[3] X-RAY-EMISSION FROM LASER-IRRADIATED PLANE SOLID TARGETS [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (06) : 2402 - 2414

[4] SUBNANOSECOND PULSES FROM A KRF LASER PUMPED SF6 BRILLOUIN AMPLIFIER [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1985, 21 (10) : 1558 - 1562

[5] GLIBERT KM, 1980, J APPL PHYS, V51, P1449

[6] X-RAY-LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (01): : 107 - 121

[7] EFFICIENT NARROWBAND ELECTRON-BEAM PUMPED KRF LASER FOR PULSE-COMPRESSION STUDIES [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (01) : 91 - 96

[8] Turcu E., 1987, Microelectronic Engineering, V6, P287, DOI 10.1016/0167-9317(87)90051-7