SILICON DETECTOR FOR STEREOSCAN SCANNING ELECTRON-MICROSCOPE

被引：6

作者：

MUNDEN, AB ^{[1
]}

WALKER, DEY ^{[1
]}

机构：

[1] UNITED KINGDOM ATOM ENERGY AUTHOR,RFL,MAT SCI GRP,SPRINGFIELDS,SALWICK,PRESTON PR4 0RR,ENGLAND

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1973年 / 6卷 / 09期

关键词：

D O I：

10.1088/0022-3735/6/9/033

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：916 / 920

页数：5

共 9 条

[1]

HASHIMOTO H, 1964, ELECTRON MICROPROBE

[2]

JOHARI O, 1971, P ANNUAL SCANNING EL, P529

[3]

KIMOTO S, 1964, ELECTRON MICROPROBE

[4]

KIMOTO S, 1972, JEOL NEWS E, V10, P2

[5]

Nomarski G., 1955, REV MET PARIS, V52, P121, DOI [10.1051/metal/195552020121, DOI 10.1051/METAL/195552020121]

[6]

Price C. W., 1971, Proceedings of the 4th annual scanning electron microscope symposium and workshop on forensic applications of the scanning electron microscope, P145

[7]

THORNTON PR, 1965, SCI J, P66

[8]

THORNTON PR, 1968, SCANNING ELECTRON MI

[9] ELECTRON BEAM CHANNELING IN SINGLE-CRYSTAL SILICON BY SCANNING ELECTRON MICROSCOPY [J].

WOLF, ED ;

EVERHART, TE .

APPLIED PHYSICS LETTERS, 1969, 14 (10) :299-&

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