In situ processing of high-T-c YBaCuO superconducting devices by focused ion beam micromachining at low temperature

被引：3

作者：

BenAssayag, G ^{[1
]}

Gierak, J ^{[1
]}

Hamet, JF ^{[1
]}

Prouteau, C ^{[1
]}

Flament, S ^{[1
]}

Dolabdjian, C ^{[1
]}

Gire, F ^{[1
]}

Lesquey, E ^{[1
]}

Gunther, G ^{[1
]}

Dubuc, C ^{[1
]}

Bloyet, D ^{[1
]}

Robbes, D ^{[1
]}

机构：

[1] INST SCI MAT & RAYONNEMENT,F-14050 CAEN,FRANCE

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1995年 / 13卷 / 06期

关键词：

D O I：

10.1116/1.588263

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A focused ion beam (FIB) system coupled to a scanning electron microscope, including a new helium-cooled stage and electrical feedthroughs, has been put into operation. It allows real-time electron imaging during FIB machining while the sample is maintained at a minimum temperature of 25 K by continuous-flow helium cooling. Simultaneously, electrical characteristics can be monitored, recorded, and stored. Experimental results on high-critical-temperature superconducting thin films are given, exhibiting the evolution of the device's response during the FIB-induced modifications. Two structures were realized at liquid-nitrogen temperature: a low-noise microbolometric sensor and a short-channel superconducting quantum interference device-like structure in YBaCuO material exhibiting a behavior of coherent vortex flow, micromachined by FIB. These experiments demonstrate the possibility of a precise in situ control of the critical current of micro- and nanobridges. (C) 1995 American Vacuum Society.

引用

页码：2772 / 2776

页数：5

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[2]

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[3]

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[4]

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