STRUCTURE AND PROPERTIES OF QUASI-AMORPHOUS FILMS PREPARED BY ION-BEAM TECHNIQUES

被引：241

作者：

WEISSMANTEL, C

BEWILOGUA, K

DIETRICH, D

ERLER, HJ

HINNEBERG, HJ

KLOSE, S

NOWICK, W

REISSE, G

机构：

来源：

THIN SOLID FILMS | 1980年 / 72卷 / 01期

关键词：

804 Chemical Products Generally - 813 Coatings; Finishes and Thin Film Deposition - 932 High Energy Physics; Nuclear Physics; Plasma Physics;

D O I：

10.1016/0040-6090(80)90554-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

27

引用

收藏

页码：19 / 31

页数：13

相关论文

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