STRUCTURE AND PROPERTIES OF QUASI-AMORPHOUS FILMS PREPARED BY ION-BEAM TECHNIQUES

被引:241
作者
WEISSMANTEL, C
BEWILOGUA, K
DIETRICH, D
ERLER, HJ
HINNEBERG, HJ
KLOSE, S
NOWICK, W
REISSE, G
机构
关键词
804 Chemical Products Generally - 813 Coatings; Finishes and Thin Film Deposition - 932 High Energy Physics; Nuclear Physics; Plasma Physics;
D O I
10.1016/0040-6090(80)90554-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
27
引用
收藏
页码:19 / 31
页数:13
相关论文
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