RECENT WORK ON TRIBOLOGY OF ION-PLATED THIN-FILMS

被引:13
作者
OHMAE, N [1 ]
机构
[1] OSAKA UNIV,SUITA 565,OSAKA,JAPAN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期
关键词
D O I
10.1116/1.568962
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:82 / 87
页数:6
相关论文
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