MEAN THICKNESS AT WHICH VAPOR-DEPOSITED THIN-FILMS REACH CONTINUITY

被引：27

作者：

KASHCHIEV, D

机构：

来源：

THIN SOLID FILMS | 1978年 / 55卷 / 03期

关键词：

D O I：

10.1016/0040-6090(78)90157-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：399 / 411

页数：13

共 25 条

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