A NEW 3-DIMENSIONAL NON-CONTACT DIGITAL OPTICAL PROFILER

被引：46

作者：

BHUSHAN, B

WYANT, JC

MEILING, J

机构：

[1] IBM CORP,TUCSON,AZ 85744

[2] UNIV ARIZONA,CTR OPT SCI,TUCSON,AZ 85721

[3] WYCO CORP,TUCSON,AZ 85719

来源：

关键词：

D O I：

10.1016/0043-1648(88)90016-6

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：301 / 312

页数：12

相关论文

共 3 条

[1] MEASUREMENT OF SURFACE-TOPOGRAPHY OF MAGNETIC TAPES BY MIRAU INTERFEROMETRY
BHUSHAN, B
WYANT, JC
KOLIOPOULOS, CL
[J]. APPLIED OPTICS, 1985, 24 (10): : 1489 - 1497
[2] Thomas T.R., 1982, ROUGH SURFACES
[3] DEVELOPMENT OF A 3-DIMENSIONAL NONCONTACT DIGITAL OPTICAL PROFILER
WYANT, JC
KOLIOPOULOS, CL
BHUSHAN, B
BASILA, D
[J]. JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1986, 108 (01): : 1 - 8