STATISTICS OF SPUTTERING

被引：37

作者：

ECKSTEIN, W

机构：

来源：

关键词：

D O I：

10.1016/0168-583X(88)90614-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：489 / 492

页数：4

共 16 条

[1]

BEHRISCH R, 1983, SPUTTERING, V1

[2]

BEHRISCH R, 1983, SPUTTERING, V2

[3] SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP [J].

BIERSACK, JP ;

ECKSTEIN, W .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02) :73-94

DIETZ, LA ;

SHEFFIELD, JC .

[5] SPUTTERING MODELS - A SYNOPTIC VIEW [J].

HARRISON, DE .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 70 (1-4) :1-64

[6]

Hastings NAJ, 1975, STATISTICAL DISTRIBU

[7]

Herzog R. F. K., 1973, Radiation Effects, V18, P199, DOI 10.1080/00337577308232122

[8]

Hultgren RR, 1973, SELECTED VALUES THER

[9]

LINDHARD J, 1963, K DAN VIDENSK SELSK, V33

[10]

MATSUNAMI N, 1980, IPPJ AM, V14