SPUTTERING STUDIES WITH THE MONTE-CARLO PROGRAM TRIM.SP

被引:833
作者
BIERSACK, JP
ECKSTEIN, W
机构
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1984年 / 34卷 / 02期
关键词
D O I
10.1007/BF00614759
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:73 / 94
页数:22
相关论文
共 71 条
  • [1] SOME EFFECTS OF ION MASS ON THE ENERGY-SPECTRUM OF SPUTTERED GOLD ATOMS
    AHMAD, S
    FARMERY, BW
    THOMPSON, MW
    [J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1981, 44 (06): : 1387 - 1394
  • [2] SELF-ION SPUTTERING YIELDS FOR COPPER, NICKEL, AND ALUMINUM
    ALLAS, RG
    KNUDSON, AR
    LAMBERT, JM
    TREADO, PA
    REYNOLDS, GW
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3): : 615 - 619
  • [3] COLLECTION AND SPUTTERING EXPERIMENTS WITH NOBLE GAS IONS
    ALMEN, O
    BRUCE, G
    [J]. NUCLEAR INSTRUMENTS & METHODS, 1961, 11 (02): : 257 - 278
  • [4] Andersen H. H., 1977, HYDROGEN STOPPING PO
  • [5] MEASUREMENTS OF ANGULAR-DISTRIBUTIONS OF SPUTTERED MATERIAL AS A NEW TOOL FOR SURFACE-SEGREGATION STUDIES - SEGREGATION IN CUPT ALLOYS
    ANDERSEN, HH
    CHERNYSH, V
    STENUM, B
    SORENSEN, T
    WHITLOW, HJ
    [J]. SURFACE SCIENCE, 1982, 123 (01) : 39 - 46
  • [6] BAY HL, 1979, RADIAT EFF DEFECT S, V41, P77, DOI 10.1080/00337577908236950
  • [7] BECERRAACEVEDO R, 1984, NUCL INSTRUM METHODS
  • [8] SPUTTERING MECHANISM FOR LOW-ENERGY LIGHT-IONS
    BEHRISCH, R
    MADERLECHNER, G
    SCHERZER, BMU
    ROBINSON, MT
    [J]. APPLIED PHYSICS, 1979, 18 (04): : 391 - 398
  • [9] Behrisch R., 1981, TOPICS APPL PHYS, V47
  • [10] BENNINGHOVEN A, 1984, SPRINGER SER CHEM PH, V36