PROPERTIES OF METALORGANIC PRECURSORS FOR CHEMICAL VAPOR-DEPOSITION OF OXIDE SUPERCONDUCTORS

被引：28

作者：

ZAMA, H

ODA, S

机构：

[1] Department of Physical Electronics, Tokyo Institute of Technology, Meguro-ku, Tokyo, 152, O-Okayama

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1990年 / 29卷 / 07期

关键词：

Chemical vapor deposition; Mass spectroscopy; Metalorganic compounds; Mocvd; Oxide superconductors; Ther-mogravimetric analysis;

D O I：

10.1143/JJAP.29.L1072

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In an attempt to improve the reproducibility of chemical vapor deposition of YBaCuO films from metalorganic compounds, we have investigated some properties of several metal β-diketonates by means of thermogravimetric analysis and mass spectroscopy. The results suggest that Ba-compounds should be vaporized under a reduced pressure of as low as 1 Torr. The vaporizing temperature becomes 180°C, being separated from the decomposition temperature of 250°C. Mass spectra of several metal β-diketonates have been obtained for the first time by paying much attention to the vaporizing temperature and ionization voltage. © 1990 The Japan Society of Applied Physics.

引用

页码：L1072 / L1074

页数：3

共 16 条

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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (08) :L1473-L1475

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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (09) :L1578-L1580

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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1989, 28 (03) :L427-L429

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[9] Y-BA-CU-O FILM GROWTH BY OMCVD USING N2O [J].

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JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (10) :L1800-L1802

[10] CRITICAL CURRENTS AT 77.3-K UNDER MAGNETIC-FIELDS UP TO 27-T FOR AN Y-BA-CU-O FILM PREPARED BY CHEMICAL VAPOR-DEPOSITION [J].

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YAMANE, H ;

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APPLIED PHYSICS LETTERS, 1989, 54 (06) :575-577

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