INVESTIGATION OF THE LIQUID-METAL ION-SOURCE CLUSTER BEAM CONSTITUENTS AND THEIR ROLE IN THE PROPERTIES OF THE DEPOSITED FILM

被引：8

作者：

FRANCOIS, M

POURREZAEI, K

BAHASADRI, A

NAYAK, D

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583858

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：178 / 183

页数：6

相关论文

共 15 条

[1] MECHANISMS OF LIQUID-METAL ION-SOURCE OPERATION
BELL, AE
SWANSON, LW
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 10-1 (MAY) : 783 - 787
[2] ION CLUSTER EMISSION AND DEPOSITION FROM LIQUID GOLD ION SOURCES
DCRUZ, C
POURREZAEI, K
WAGNER, A
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (07) : 2724 - 2730
[3] MECHANISM OF LIQUID-METAL ELECTRON AND ION SOURCES
GOMER, R
[J]. APPLIED PHYSICS, 1979, 19 (04): : 365 - 375
[4] SHAPE OF A LIQUID-METAL ION-SOURCE - A DYNAMIC-MODEL INCLUDING FLUID-FLOW AND SPACE-CHARGE EFFECTS
KINGHAM, DR
SWANSON, LW
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 34 (02): : 123 - 132
[5] DERIVATION OF THE CONDITION FOR ONSET OF INSTABILITIES OF A CONDUCTING FLUID SURFACE UNDER ELECTROSTATIC STRESS - APPLICATION TO LIQUID-METAL ION SOURCES
MISKOVSKY, NM
CUTLER, PH
KAZES, E
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 202 - 206
[6] THE DEVELOPMENT OF A SPRAYER FOR FIELD-EMISSION DEPOSITION
PREWETT, PD
GOWLAND, L
AITKEN, KL
MAHONY, CMO
[J]. THIN SOLID FILMS, 1981, 80 (1-3) : 117 - 124
[7] SOME COMMENTS ON THE MECHANISM OF EMISSION FROM LIQUID-METAL ION SOURCES
PREWETT, PD
MAIR, GLR
THOMPSON, SP
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (07) : 1339 - 1348
[8] PREWETT PD, 1983, GOLD B, V16, P34
[9] DISINTEGRATION OF WATER DROPS IN ELECTRIC FIELD
TAYLOR, G
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1964, 280 (1380) : 383 - +
[10] FIELD-EMISSION OF METAL-IONS AND MICROPARTICLES
THOMPSON, SP
VONENGEL, A
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1982, 15 (05) : 925 - 931