PB(ZR, TI)O3 THIN-FILM PREPARATION BY MULTITARGET MAGNETRON SPUTTERING

被引：30

作者：

HIRATA, K ^{[1
]}

HOSOKAWA, N ^{[1
]}

HASE, T ^{[1
]}

SAKUMA, T ^{[1
]}

MIYASAKA, Y ^{[1
]}

机构：

[1] NEC CORP LTD,FUNDAMENTAL RES LABS,MIYAMAE KU,KAWASAKI 216,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 9B期

关键词：

PZT; MULTITARGET MAGNETRON SPUTTERING; ATOMIC RATIOS OF PB/(ZR+TI) AND ZR/(ZR+TI); STOICHIOMETRY; EDX; PPBO;

D O I：

10.1143/JJAP.31.3021

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ferroelectric lead zirconate-titanate (PZT) thin films have been prepared on Pt-coated oxidized Si substrates (Pt/Ti/SiO2/Si) Utilizing a multitarget magnetron sputtering system with three Pb(Zr0.5, Ti0.5)O3 targets and one PbO target. Crystal structure and dielectric properties of the films have been studied as functions of substrate temperature (T(s)) and Pb content. The Pb content in the film has been precisely controlled by optimizing the rf input power for the PbO target (P(PbO)). As a result, single-phase perovskite films have been prepared fairly easily with appropriate combinations of T(s) and P(PbO). A film with atomic ratios of Pb/(Zr + Ti) = 1.3 and Zr/(Zr + Ti)=0.5 prepared at T(s)=600-degrees-C exhibited a dielectric constant of 780 and remanent polarization of 19 muC/cm2.

引用

页码：3021 / 3024

页数：4

共 3 条

[1] PZT THIN-FILM PREPARATION ON PT-TI ELECTRODE BY RF-SPUTTERING
ABE, K
TOMITA, H
TOYODA, H
IMAI, M
YOKOTE, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B): : 2152 - 2154
[2] SPUTTERING PREPARATION OF FERROELECTRIC PLZT THIN-FILMS AND THEIR OPTICAL APPLICATIONS
ADACHI, H
WASA, K
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1991, 38 (06) : 645 - 655
[3] STUDY OF THE SPUTTERING OF ONE-COMPONENT, 2-COMPONENT AND 3-COMPONENT TARGETS FOR THE PREPARATION OF YBA2CU3O7 SUPERCONDUCTING FILM
HIRATA, K
ISHIBASHI, K
HOSOKAWA, N
[J]. THIN SOLID FILMS, 1991, 206 (1-2) : 132 - 136

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