DEPOSITION OF ALUMINUM ON KAPTON LAMINATES BY ELECTRON-BEAM EVAPORATION

被引:5
作者
SHERMAN, DM [1 ]
机构
[1] BENDIX CORP,KANSAS CITY,MO 64141
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 03期
关键词
D O I
10.1116/1.569520
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1113 / 1116
页数:4
相关论文
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