TRANSMISSION ELECTRON-MICROSCOPY OF ELASTIC RELAXATION EFFECTS IN SI-GE STRAINED LAYER SUPERLATTICE STRUCTURES

被引:11
作者
PEROVIC, DD [1 ]
WEATHERLY, GC [1 ]
HOUGHTON, DC [1 ]
机构
[1] NATL RES COUNCIL CANADA,DIV PHYS,MICROSTRUCT SCI LAB,OTTAWA K1A 0R6,ONTARIO,CANADA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.575695
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1333 / 1336
页数:4
相关论文
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