2 ALIGNMENT METHODS FOR POLARIZER AND ANALYZER IN AN ELLIPSOMETER

被引：6

作者：

LILJENVALL, HG

MATHEWSON, AG

机构：

来源：

关键词：

D O I：

10.1364/AO.9.001489

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：1489 / +

页数：1

相关论文

共 2 条

[1] Ghezzo M., 1969, British Journal of Applied Physics (Journal of Physics D), V2, P1483
[2] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY
MCCRACKIN, FL
PASSAGLIA, E
STROMBERG, RR
STEINBERG, HL
[J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04): : 363 - +