ELECTROPHOTOGRAPHIC PROPERTIES OF RF GLOW DISCHARGE-PRODUCED AMORPHOUS SI-H FILM

被引:27
作者
YAMAMOTO, N
NAKAYAMA, Y
WAKITA, K
NAKANO, M
KAWAMURA, T
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D O I
10.7567/JJAPS.20S1.305
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O59 [应用物理学];
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页码:305 / 310
页数:6
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