A MODEL FOR DIELECTRIC-BREAKDOWN IN PLASMA-POLYMERIZED STYRENE THIN-FILMS

被引：6

作者：

HIKITA, M

MATSUDA, A

NAGAO, M

SAWA, G

IEDA, M

机构：

[1] TOYOHASHI UNIV TECHNOL,DEPT ELECT & ELECTR ENGN,TOYOHASHI,AICHI 440,JAPAN

[2] MIE UNIV,DEPT ELECTR ENGN,TSU,MIE 514,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 03期

关键词：

D O I：

10.1143/JJAP.21.483

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：483 / 489

页数：7

共 22 条

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IEDA, M .

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