A micromachined low-power temperature-regulated bandgap voltage reference

被引:8
作者
Reay, RJ
Klaassen, EH
Kovacs, GTA
机构
[1] Center for Integrated Systems, Stanford University, Stanford
基金
美国国家科学基金会;
关键词
D O I
10.1109/4.482164
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A low-power, temperature-regulated bandgap voltage reference is demonstrated in a commercial CMOS process. Low-power operation is achieved by thermally isolating a small portion of the die using a single postprocess micromachining step requiring no extra masks or modifications to the CMOS process, The reference has a 53000 degrees C/W thermal resistance, a 2.5 ms thermal time constant, and uses 1.5 mW at 25 degrees C. Temperature regulation improves the temperature coefficient from 400 ppm/degrees C to 9 ppm/degrees C over 0-80 degrees C.
引用
收藏
页码:1374 / 1381
页数:8
相关论文
共 22 条
[21]  
Moser D., CMOS flow sensors, (1993)
[22]  
The Reliability Handbook, (1987)