INVESTIGATION OF ION-BEAM SYNTHESIZED IRON SILICIDE BY RBS, XRD, AND MOSSBAUER-SPECTROSCOPY (CEMS)

被引：13

作者：

REUTHER, H ^{[1
]}

WIESER, E ^{[1
]}

PANKNIN, D ^{[1
]}

GROTZSCHEL, R ^{[1
]}

SKORUPA, W ^{[1
]}

机构：

[1] TECH UNIV DRESDEN,O-8027 DRESDEN,GERMANY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 68卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(92)96084-C

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The formation of FeSi2 by implantation of 4 and 5 X 10(17) Fe/cm2 (300 keV) at 350-degrees-C into (100) silicon and subsequent annealing in the temperature range between 600 and 1050-degrees-C is studied. Analysis of the phase composition by conversion electron Mossbauer spectroscopy (CEMS) and X-ray diffraction shows an admixture of FeSi beside FeSi2. The redistribution of iron due to the phase transition from beta- to alpha-FeSi2 and vice versa is investigated by Rutherford backscattering spectrometry.

引用

页码：241 / 244

页数：4

共 9 条

[1]

DERRIEN J, IN PRESS APPL SURF S

[2] TRANSFORMATION MECHANISMS OF ALPHA REVERSIBLE BETA TRANSITION IN FESI2 [J].

LECORRE, C ;

GENIN, JM .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1972, 51 (01) :K85-&

[3]

MULLER G, 1990, NUCL INSTRUM METH B, V50, P348

[4] ION-BEAM SYNTHESIS OF A SI/BETA-FESI2/SI HETEROSTRUCTURE [J].

OOSTRA, DJ ;

VANDENHOUDT, DEW ;

BULLELIEUWMA, CWT ;

NABURGH, EP .

APPLIED PHYSICS LETTERS, 1991, 59 (14) :1737-1739

[5]

OOSTRA DJ, 1991, IN PRESS MATER SCI B, V12

[6]

PANKNIN D, 1991, IN PRESS MATER SCI B, V12

[7]

RADEMACHER K, 1991, IN PRESS MATER SCI B, V12

[8] ION-BEAM SYNTHESIS OF BURIED ALPHA-FESI2 AND BETA-FESI2 LAYERS [J].

RADERMACHER, K ;

MANTL, S ;

DIEKER, C ;

LUTH, H .

APPLIED PHYSICS LETTERS, 1991, 59 (17) :2145-2147

[9]

SNACHEZ FH, 1986, MATER RES SOC S P, V51, P549

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