SUBSTRATE BIAS EFFECT ON THE OXYGEN CONTAMINATION IN AMORPHOUS GDCO SPUTTERED FILMS

[1] EFFECTS OF DC BIAS ON FABRICATION OF AMORPHOUS GDCO RF SPUTTERED FILMS [J]. IEEE TRANSACTIONS ON MAGNETICS, 1975, 11 (05) : 1332 - 1334

[2] CUOMO JJ, 1977, J VAC SCI TECHNOL, V14, P152, DOI 10.1116/1.569109

[3] DAVIS LE, 1976, HDB AUGER ELECTRON S

[4] ESHO S, 1976, AIP C P, V34, P331

[5] ATOMIC DIFFUSION IN AMORPHOUS GD-FE THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (03) : 1648 - 1650

[6] DOMINANT CONTRIBUTION OF PREFERENTIAL RE-SPUTTERING EFFECT ON PERPENDICULAR UNIAXIAL ANISOTROPY IN AMORPHOUS GD-CO FILMS [J]. JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1977, 42 (03) : 1057 - 1058

[7] MAISSEL LI, 1970, HDB THIN FILM TECHNO, pCH4

[1] EFFECTS OF DC BIAS ON FABRICATION OF AMORPHOUS GDCO RF SPUTTERED FILMS [J]. IEEE TRANSACTIONS ON MAGNETICS, 1975, 11 (05) : 1332 - 1334

[2] CUOMO JJ, 1977, J VAC SCI TECHNOL, V14, P152, DOI 10.1116/1.569109

[3] DAVIS LE, 1976, HDB AUGER ELECTRON S

[4] ESHO S, 1976, AIP C P, V34, P331

[5] ATOMIC DIFFUSION IN AMORPHOUS GD-FE THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (03) : 1648 - 1650

[6] DOMINANT CONTRIBUTION OF PREFERENTIAL RE-SPUTTERING EFFECT ON PERPENDICULAR UNIAXIAL ANISOTROPY IN AMORPHOUS GD-CO FILMS [J]. JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1977, 42 (03) : 1057 - 1058

[7] MAISSEL LI, 1970, HDB THIN FILM TECHNO, pCH4