EFFECTS OF DC BIAS ON FABRICATION OF AMORPHOUS GDCO RF SPUTTERED FILMS

被引：22

作者：

BOURNE, HC

GOLDFARB, RB

WILSON, WL

ZWINGMAN, R

机构：

[1] RICE UNIV,ELECT ENGN DEPT,HOUSTON,TX 77001

[2] RICE UNIV,MAT SCI DEPT,HOUSTON,TX 77001

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1975年 / 11卷 / 05期

关键词：

D O I：

10.1109/TMAG.1975.1058897

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1332 / 1334

页数：3

共 7 条

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[2] AMORPHOUS METALLIC FILMS FOR BUBBLE DOMAIN APPLICATIONS [J].

CHAUDHARI, P ;

CUOMO, JJ ;

GAMBINO, RJ .

IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1973, 17 (01) :66-68

[3]

CRONEMEYER DC, 1973, MAGNETISM MAGNETIC M, V18, P85

[4]

Kooy C., 1960, PHILIPS RES REP, V15, P7

[5] ROLE OF DC SELF-BIAS POTENTIAL IN CONTROL OF RF SPUTTERING [J].

LAMONT, LT ;

TURNER, FT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :47-51

[6]

OKAMOTO K, 1974, INT MAG C TORONTO

[7] DETERMINATION OF MAGNETIC BUBBLE FILM PARAMETERS FROM STRIP DOMAIN MEASUREMENTS [J].

SHAW, RW ;

HILL, DE ;

SANDFORT, RM ;

MOODY, JW .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (05) :2346-2349

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