TRANSIENT MEASUREMENTS ON MINIATURIZED DIAPHRAGM PUMPS IN MICROFLUID SYSTEMS

被引：11

作者：

ZENGERLE, R

GEIGER, W

RICHTER, M

ULRICH, J

KLUGE, S

RICHTER, A

机构：

[1] Fraunhofer-Institut für Festkörpertechnologie, Munich, D-80686

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1995年 / 47卷 / 1-3期

关键词：

MICROFLUID SYSTEMS; MINIATURIZED DIAPHRAGM PUMP;

D O I：

10.1016/0924-4247(94)00961-G

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper the dynamics of miniaturized diaphragm pumps will be investigated by transient pressure measurements on the millisecond time scale. The results will be compared with simulations. It will be shown that there is a strong interaction between the dynamics of miniaturized diaphragm pumps and the geometry of the connected fluid channels, caused by the inertia of the fluid.

引用

页码：557 / 561

页数：5

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