A PIEZOELECTRIC MICROPUMP BASED ON MICROMACHINING OF SILICON

[1] BOUWSTRA S, 1986, 3RD P SENS ACT S NET, P199

[2] LOW ENERGY METAL-GLASS BONDING [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (13) : 5396 - &

[3] MULDER JCM, 1984, THESIS U TWENTE NETH

[4] SILICON AS A MECHANICAL MATERIAL [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457

[5] SMITS JG, 1985, Patent No. 8302860

[6] TIMOSHENKO S, 1950, THEORY PLATES SHELLS, P364

[7] Timoshenko S. P., 1950, THEORY PLATES SHELLS, P51

[8] FIELD ASSISTED GLASS-METAL SEALING [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (10) : 3946 - &

[9] YOUNGS MODULUS SHEAR MODULUS AND POISSONS RATIO IN SILICON AND GERMANIUM [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (01) : 153 - +

[1] BOUWSTRA S, 1986, 3RD P SENS ACT S NET, P199

[2] LOW ENERGY METAL-GLASS BONDING [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (13) : 5396 - &

[3] MULDER JCM, 1984, THESIS U TWENTE NETH

[4] SILICON AS A MECHANICAL MATERIAL [J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457

[5] SMITS JG, 1985, Patent No. 8302860

[6] TIMOSHENKO S, 1950, THEORY PLATES SHELLS, P364

[7] Timoshenko S. P., 1950, THEORY PLATES SHELLS, P51

[8] FIELD ASSISTED GLASS-METAL SEALING [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (10) : 3946 - &

[9] YOUNGS MODULUS SHEAR MODULUS AND POISSONS RATIO IN SILICON AND GERMANIUM [J]. JOURNAL OF APPLIED PHYSICS, 1965, 36 (01) : 153 - +