EMPIRICAL ELECTRON BACKSCATTER MODEL FOR THIN RESIST FILMS ON A SUBSTRATE

被引：16

作者：

HEIDENREICH, RD ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 04期

关键词：

D O I：

10.1063/1.323881

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

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页码：1418 / 1425

页数：8

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