DETERMINATION OF THE COORDINATION-NUMBER OF CO ATOMS AT THE COSI2(A,B) SI(111) INTERFACE BY TRANSMISSION ELECTRON-MICROSCOPY

被引：39

作者：

BULLELIEUWMA, CWT ^{[1
]}

DEJONG, AF ^{[1
]}

VANOMMEN, AH ^{[1
]}

VANDERVEEN, JF ^{[1
]}

VRIJMOETH, J ^{[1
]}

机构：

[1] FOM,INST ATOM & MOLEC PHYS,1098 SJ AMSTERDAM,NETHERLANDS

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 07期

关键词：

D O I：

10.1063/1.102439

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：648 / 650

页数：3

共 17 条

[1] MICROSTRUCTURE OF HETEROEPITAXIAL SI/COSI2/SI FORMED BY CO IMPLANTATION INTO (100) AND (111) SI
BULLELIEUWMA, CWT
VANOMMEN, AH
VANIJZENDOORN, LJ
[J]. APPLIED PHYSICS LETTERS, 1989, 54 (03) : 244 - 246
[2] SUPPRESSION OF SURFACE-TOPOGRAPHY DEVELOPMENT IN ION-MILLING OF SEMICONDUCTORS
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ZALM, PC
[J]. SURFACE AND INTERFACE ANALYSIS, 1987, 10 (04) : 210 - 215
[3] BULLELIEUWMA CWT, 1988, RES SOC S P, V102, P377
[4] ATOMIC-STRUCTURE OF THE NISI2/(111)SI INTERFACE
CHERNS, D
ANSTIS, GR
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SPENCE, JCH
[J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1982, 46 (05): : 849 - 862
[5] THE REAL SPACE METHOD FOR DYNAMICAL ELECTRON-DIFFRACTION CALCULATIONS IN HIGH-RESOLUTION ELECTRON-MICROSCOPY .3. A COMPUTATIONAL ALGORITHM FOR THE ELECTRON PROPAGATION WITH ITS PRACTICAL APPLICATIONS
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VANDYCK, D
[J]. ULTRAMICROSCOPY, 1984, 15 (04) : 287 - 299
[6] DE A. J., UNPUB
[7] DETERMINATION OF THE ATOMIC-STRUCTURE OF THE EPITAXIAL COSI2-SI(111) INTERFACE USING HIGH-RESOLUTION RUTHERFORD BACKSCATTERING
FISCHER, AEMJ
GUSTAFSSON, T
VANDERVEEN, JF
[J]. PHYSICAL REVIEW B, 1988, 37 (11): : 6305 - 6310
[8] STRUCTURE DETERMINATION OF THE COSI2-SI(111) INTERFACE BY X-RAY STANDING-WAVE ANALYSIS
FISCHER, AEMJ
VLIEG, E
VANDERVEEN, JF
CLAUSNITZER, M
MATERLIK, G
[J]. PHYSICAL REVIEW B, 1987, 36 (09): : 4769 - 4773
[9] GROWTH OF UNIFORM EPITAXIAL COSI2 FILMS ON SI(111)
FISCHER, AEMJ
SLIJKERMAN, WFJ
NAKAGAWA, K
SMITH, RJ
VANDERVEEN, JF
BULLELIEUWMA, CWT
[J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (06) : 3005 - 3013
[10] GIBSON JM, 1982, APPL PHYS LETT, V41, P818, DOI 10.1063/1.93699

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