QUARTZ CRYSTAL MONITORING FOR OPTICAL THIN FILMS

被引：6

作者：

CLAPHAM, PB

DOWNS, MJ

RAINE, KW

机构：

[1] Division of Optical Metrology, National Physical Laboratory, Teddington, Middlesex

来源：

关键词：

D O I：

10.1016/0040-6090(69)90102-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：R39 / &

共 8 条

BAKOS, J ;

NAGY, G ;

SZIGETI, J .

[2]

CLAPHAM PB, IN PRESS

[3] A VERSATILE THIN FILM THICKNESS MONITOR OF HIGH ACCURACY [J].

LAWSON, WH .

JOURNAL OF SCIENTIFIC INSTRUMENTS, 1967, 44 (11) :917-&

[4]

Pulker H.K., 1967, THIN SOLID FILMS, V1, P400

PULKER, HK ;

GIRARDET, E .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (01) :131-&

[6]

RIEGERT RP, 1968, 4 P INT VAC C 2

RITTER, E ;

HOFFMANN, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (04) :733-&

RYSANEK, VZ .

APPLIED OPTICS, 1965, 4 (08) :993-&