NOVEL IN-SITU METHOD TO DETECT SUBNANOMETER-SIZED PARTICLES IN PLASMAS AND ITS APPLICATION TO PARTICLES IN HELIUM-DILUTED SILANE RADIO-FREQUENCY PLASMAS

被引：33

作者：

FUKUZAWA, T

SHIRATANI, M

WATANABE, Y

机构：

[1] Department of Electrical Engineering, Faculty of Engineering, Kyushu University, Hakozaki

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 23期

关键词：

D O I：

10.1063/1.111359

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new Langmuir probe method is proposed to reveal processes of particulate nucleation and its subsequent early growth in silane radio frequency (rf) plasmas. In the method, subnanometer-sized particles grown during the rf-discharge-on phase are detected as negative ions in the subsequent afterglow phase in which temperature and density of electrons have decayed. Preliminary experiments applying the method to helium-diluted silane rf plasmas have the following features of particle growth: subnanometer-sized particles are mainly generated around the plasma/sheath boundary near the rf electrode; they grow with increase in the rf-discharge-on period, T(on), for T(on) less than or similar to a gas residence time of the discharge.

引用

页码：3098 / 3100

页数：3

共 18 条

[1] PARTICLE GENERATION AND BEHAVIOR IN A SILANE-ARGON LOW-PRESSURE DISCHARGE UNDER CONTINUOUS OR PULSED RADIOFREQUENCY EXCITATION [J].