BRIGHT VISIBLE PHOTOLUMINESCENCE OF SPARK-PROCESSED GE, GAAS, AND SI

被引:48
作者
LUDWIG, MH
HUMMEL, RE
CHANG, SS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 05期
关键词
D O I
10.1116/1.587553
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
High-frequency spark discharges were applied to single-crystalline wafers of Ge, GaAs, and Si. The spark-processed (sp-) samples were characterized by photoluminescence (PL) and Raman measurements. Strong and stable luminescence with wavelengths centered at 416 and 525 nm was observed in sp-Ge and sp-Si layers, respectively, when excited with a 325 nm laser beam. A considerable blue shift of the PL (compared to the unsparked specimen) was also detected for sp-GaAs with an average peak wavelength around 500 nm. The Raman Shifts of the spark-processed materials indicate that nanocrystals were formed, having diameters of 3.5-4 nm for Si and about 6 nm for Ge. A correlation between the PL wavelengths, the nanocrystal sizes, and the different semiconductor materials has been established based on the effective-mass approximation. Making use of this model the nanocrystallite sizes have been found to range between similar to 3 nm for Si and similar to 5 nm for Ge. The related wavelengths for optical transitions confirm the PL results. The findings support the quantum confinement model.
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页码:3023 / 3026
页数:4
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