SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS

被引:7511
作者
CANHAM, LT
机构
[1] Royal Signals and Radar Establishment, Worcestershire WR14 3PS, St. Andrews Road
关键词
D O I
10.1063/1.103561
中图分类号
O59 [应用物理学];
学科分类号
摘要
Indirect evidence is presented that free-standing Si quantum wires can be fabricated without the use of epitaxial deposition or lithography. The novel approach uses electrochemical and chemical dissolution steps to define networks of isolated wires out of bulk wafers. Mesoporous Si layers of high porosity exhibit visible (red) photoluminescence at room temperature, observable with the naked eye under <1 mW unfocused (<0.1 W cm-2) green or blue laser line excitation. This is attributed to dramatic two-dimensional quantum size effects which can produce emission far above the band gap of bulk crystalline Si.
引用
收藏
页码:1046 / 1048
页数:3
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