BLACKENING OF TIN OXIDE THIN-FILMS HEAVILY-DOPED WITH ANTIMONY

被引:102
作者
KOJIMA, M
KATO, H
GATTO, M
机构
[1] Nagoya Municipal Industrial Research Institute, Atsuta-ku, Nagoya, 3-4-41, Rokuban
来源
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1993年 / 68卷 / 02期
关键词
D O I
10.1080/01418639308226402
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The electrical and optical properties of tin oxide (SnO2) thin films heavily doped with antimony (Sb) have been investigated. The films were prepared by spray pyrolysis at a temperature of 500-degrees-C. An undoped SnO2 film is transparent and its resistivity is 4 x 10(-3) OMEGAcm. With increase in antimony content the resistivity initially decreases and then begins to increase. The decrease in the resistivity can be attributed to the substitutional doping by pentavalent antimony Sb5+, whereas the increase in the resistivity can be attributed to the substitutional doping by trivalent antimony Sb3+. The films become opaque with increasing antimony content and finally turn black. The interaction between antimony in the two different oxidation states in the SnO2 lattice is responsible for the blackening of the films.
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页码:215 / 222
页数:8
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