High J(c) superconducting Y-Ba-Cu-O (YBCO) thin films were prepared on metal substrates at 700-degrees-C under low oxygen partial pressure by chemical vapor deposition (CVD). Two kinds of substrates were used. One is a polycrystalline Hi-based alloy (Hastelloy C-276) with YSZ and Ag buffers, and another is the same alloy with a biaxially aligned YSZ(100) buffer. The biaxially aligned YSZ(100) buffer layer was formed by ion-beam-assisted deposition (IBAD). According to X-ray diffraction (XRD) analysis, these films were c-axis oriented. The YBCO film on Hastelloy C-276 with YSZ and Ag buffers had a critical temperature (Tc) with zero resistivity at 84.5 K and a critical current density (J(c)) of 5.7 x 10(3) A/cm2(77.3 K, 0 T). YBCO film on Hastelloy C-276 with a biaxially aligned YSZ(100) buffer had a T(c) at 87.5 K and J(c) of 7.1 x 10(4) A/cm2 (77.3 K, 0 T) and 3.0 x 10(3) A/cm2 (77.3 K, 7 T).