SCANNING-FORCE-MICROSCOPE TEST SYSTEM FOR DEVICE INTERNAL TEST WITH HIGH SPATIAL AND TEMPORAL RESOLUTION

被引：11

作者：

BOHM, C

ROTHS, C

KUBALEK, E

机构：

[1] Universität-GH-Duisburg, Fachgebeit Werkstoffe der Elektrotechnik, Bismarckstraße 81

来源：

MICROELECTRONIC ENGINEERING | 1994年 / 24卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(94)90058-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new device internal test technique is introduced based on a scanning force microscope enabling the electrical characterization of integrated circuits with both high spatial and temporal resolution. Device internal electrical signals are measured time resolved up to 15 GHz and on device structures down to 1 mum.

引用

页码：91 / 98

页数：8